ALD System

Brand: PicosunTM

Model and Features: R200 PE ALD Advanced – Atomic Layer Deposition (ALD) system creates ultra-thin films of various materials – oxides, nitrides, sulphides, carbides, fluorides, metals, even polymers – on practically all kinds of surfaces with digitally precise and repeatable control over film thickness, uniformity and composition.

Location:  Room 504

Person in charge: Dr. Oleg Kreinin